Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition

in: Superconductor Science & Technology (2026)
Linzen, Sven Peter; Ziegler, Mario; Oelsner, Gregor; Stolz, Ronny; Ilichev, Evgeni; Lorenz, J.; Tautz, F. S.; Lüpke, F.
Due to their high kinetic inductance, highly disordered superconducting thin films are a potential hardware for the realization of compact, low-noise elements in cryoelectronic applications. However, high disorder typically results in structural defects that cause spatial inhomogeneity of the superconducting order parameter, thereby impairing the film’s properties. Here, we employ scanning tunneling microscopy to demonstrate that NbN thin films fabricated by plasma-enhanced atomic layer deposition (PE-ALD) exhibit unusual spatial homogeneity, even at thicknesses approaching the superconductor-insulator transition. Tunneling spectra acquired across the sample surface show only small variations of the order parameter with a standard deviation of 2 − 3%, on length scales that significantly exceed the film’s grain size. At the same time, the films achieve a relatively high sheet resistance (up to 1400 Ohm) and, consequently, a high sheet kinetic inductance (up to approximately 200 pH), making them well-suited for applications.

Third party cookies & scripts

This site uses cookies. For optimal performance, smooth social media and promotional use, it is recommended that you agree to third party cookies and scripts. This may involve sharing information about your use of the third-party social media, advertising and analytics website.
For more information, see privacy policy and imprint.
Which cookies & scripts and the associated processing of your personal data do you agree with?

You can change your preferences anytime by visiting privacy policy.