Europa, Deutschland, Thüringen, Jena. Sensor für Raman2go. Leibniz-Institut für Photonische Technologien. 05.11.2018 © 2018 Sven Döring / Agentur Focus
Our Research
The Competence Center for Micro and Nanotechnologies (KMNT) is a central technology group at Leibniz IPHT and provides essential key technologies for research across the entire institute. Using top-down thin-film processes, the center develops chip- and wafer-based micro- and nanoscale functional components with broad application potential for numerous research units.
The center covers the complete technological process chain—from design and mask fabrication through lithography, layer deposition and structuring to assembly and interconnection technologies as well as analytics. All work is carried out in a state-of-the-art cleanroom infrastructure; key processes are quality-assured in accordance with DIN EN ISO 9001:2015. In this way, the competence center creates reliable technological foundations for experimental research and instrument development.
The interdisciplinary team, combining scientific, engineering, and technical expertise, supports the development and fabrication of sensors and functional components for a wide range of applications in photonics, sensing, and the life sciences. As an enabler, KMNT links technological excellence with targeted support of scientific questions within the institute and beyond. A particular focus lies on the fabrication of infrared thermal sensors and on wafer-level nanostructuring.
Forschungsschwerpunkte
Micro- & Nanofabrication
in the Cleanroom
Top-down thin-film processes from design to assembly and interconnection technologies at chip and wafer level
Sensors for IR &
THz Radiation
Development and fabrication of radiation and thermal sensors for scientific and industrial applications
Plasmonic &
Nano-Optical Structures
Nanostructuring for plasmonic materials, metamaterials, and micro- and nano-optical components
Single-Photon
Sensing
Solid-state qubits, superconducting quantum detectors, single-photon detectors
Microfluidic
Components
Microfluidic structures for lab-on-a-chip systems in medical and life science applications
Materials &
Structural Analysis
Analytical methods for process control, quality assurance, and characterization of micro- and nanoscale structures
Collaborations and Networks
The Competence Center for Micro and Nanotechnologies works closely with almost all research units at Leibniz IPHT, providing essential technological platforms for science. As an institute-wide key technology, the center enables the realization of complex components and sensor systems used in spectroscopy, imaging, quantum technologies, and biophotonic applications.
In addition, the competence center supports cooperative development projects with external research and industrial partners. Current partners include the Institute of Physical Chemistry at Friedrich Schiller University Jena, IMMS GmbH, fzmb GmbH, Analytik Jena GmbH, LUCAS instruments GmbH, and microfluidic ChipShop GmbH.
Customized manufacturing and development services range from joint process development to prototype realization and small-series production. Examples include long-standing collaborations with companies such as Jenoptik, Raith GmbH, LightSource, and Supracon.
Through this close integration of technology development, quality assurance, and application, the competence center makes a significant contribution to the performance of Leibniz IPHT as a research and technology partner.
Selected Projects
Parallel Analysis of Biological Interactions
Multi-Interact: 2D sensor platform for time-resolved multiparameter analysis in pharmaceutical and diagnostic applications
Precise Thin-Film Technologies for Accelerated Process Development
ALD-Rapid: Atomic layer deposition with sub-nanometer control for the targeted tailoring of optical and electrical properties
Reliable Imaging for Minimally Invasive Diagnostics
GRIN-Bendoskop: Bend-insensitive GRIN multimode fibers for a holographic endoscope
Recent Publications
Our Web Catalog
The Competence Center for Micro and Nanotechnologies specializes in the fabrication of infrared thermal sensors and wafer-level nanostructuring. The highly qualified team of scientists, engineers, and laboratory specialists supports the development and manufacture of sensors for a wide range of thermal sensing applications.
