Competence Center for Micro- and Nanotechnologies

Accurate inductance calculations are critical for the design of both digital and analogue superconductive integrated circuits, and three-dimensional calculations are gaining importance with the advent of inductive biasing, inductive coupling and sky plane shielding for RSFQ cells. InductEx, an extraction programme based on the three-dimensional calculation software FastHenry, was proposed earlier. InductEx uses segmentation techniques designed to accurately model the geometries of uperconductive integrated circuit structures. Inductance extraction for complex multi-terminal three-dimensional structures from current distributions calculated by FastHenry is discussed. Results for both a reflection plane modelling an infinite ground plane and a finite segmented ground plane that allows inductive elements to extend over holes in the ground plane are shown. Several SQUIDs were designed for and fabricated with IPHT’s 1 kA cm−2 RSFQ1D niobium process. These SQUIDs implement a number of loop structures that span different layers, include vias, inductively coupled control lines and ground plane holes. We measured the loop inductance of these SQUIDs and show how the results are used to calibrate the layer parameters in InductEx and verify the extraction accuracy. We also show that, with proper modelling, FastHenry can be fast enough to be used for the extraction of typical RSFQ cell inductances.