Structured SiN membranes as platform for cryogenic bolometers

in: Microelectronic Engineering (2009)
Anders, Solveig; May, Torsten; Zakosarenko, Vyacheslav; Starkloff, Michael; Zieger, Gabriel; Meyer, Hans-Georg
Cryogenic bolometers detect radiation by measuring the temperature increase in an appropriate absorber. To achieve sufficient detector sensitivity, we place the bolometer on a SiN membrane. Thermal coupling is further decreased by patterning the membrane in the shape of a platform suspended by several beams. We will describe the fabrication process and discuss the use of bolometer arrays for security cameras and telescopes.

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