Competence Center for Micro- and Nanotechnologies

The scientific and technological interest in metamaterials is triggered by their specific unconventional optical properties, which enable a large pallet of applications. Here, we present the optical properties of metamaterials obtained by microstructuring in the form of square-cavity-array in the resist nanolayer on Si/NiCr/Ti/multilayer. The infrared metamaterials shown polarization dependent response, which is pronounced at 80° angle of incident light and is adjustable via periodicity of the square-cavity-array in resist. An effective negative dielectric constant(〈ε1〉)was observed for all microstructures as a function of their periodicity. Interestingly, the porous platinum electrochemical filling extends the spectral range of negative extinction coefficients and makes that the effective dielectric constants approach to zero. Experimental results on square cavity array in resists are confirmed by COMSOL simulation.