Structured SiN membranes as platform for cryogenic bolometers
in: Microelectronic Engineering (2009)
Cryogenic bolometers detect radiation by measuring the temperature increase in an appropriate absorber. To achieve sufficient detector sensitivity, we place the bolometer on a SiN membrane. Thermal coupling is further decreased by patterning the membrane in the shape of a platform suspended by several beams. We will describe the fabrication process and discuss the use of bolometer arrays for security cameras and telescopes.