Laser induced deflection (LID) technique is used to investigate the CaF2 surface absorption at 193nm after surface treatment by ion beam figuring (IBF) and subsequent AR coating process, respectively. In comparison to a standard pitch polishing, enhanced surface absorption (subsurface damage) is observed after IBF treatment. However, after AR coating deposition, the total surface absorption of IBF treated samples does not exceed values obtained for pitch polished samples. The experimental results provide indication that IBF treatment yields both, fluorine displacement and deficiency in the CaF2 subsurface region which are annealed during the coating process by the high temperature and the fluorine supply from the fluoridic coating materials, respectively.