Exploiting extreme coupling to realize a metamaterial perfect absorber

in: Microelectronic Engineering (2013)
Hübner, Uwe; Pshenay-Severin, Ekaterina; Menzel, Christoph; Ziegler, Mario; Rockstuhl, Carsten; Lederer, Falk; Pertsch, Thomas; Meyer, Hans-Georg; Popp, Jürgen; Alaee, Rasoul
An optical metamaterial which uses the effect of strong coupling between closely spaced nanostructured gold metal plates and a planar gold substrate was realized by means of electron beam lithography and lift-off technique. The oxide layer, only a few nanometre thick, was made by using atomic layer deposition. The metamaterial shows the predicted effect of perfect absorption within multiple resonances in the spectral range from 100 THz to 600 THz. The plasmonic based resonance frequencies are very sensitive to the plate size of the grating and the spacer thickness.

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