A new high detectivity room temperature linear thermopile array with a D* greater than 2 x 10^9 cmHz1/2/W based on organic membranes
in: Microsystem Technologies - Micro- and Nanosystems Information Storage and Processing Systems (2013)
We present a newly designed high detective thermoelectric linear array based on an organic membrane for the room temperature range. The sensor array has 64 individual readable channels and was designed and developed for IR spectroscopy. This detector may be used to draw conclusions about the condition of lubricants and coolants within a system, so that they can be replaced when needs be, e.g. determining the age of technical oils of wind power plants in real time. Thus valuable resources can be saved and costly damage to equipment avoided. In order to achieve a high D* greater than 2109 Jones, the sensor was designed and optimized to be operated under vacuum conditions. For minimizing the thermal cross talk between the individual pixels, they are separated from each other by a 50 micron slit in the self-supporting organic membrane made of SU-8.
DOI: 10.1021/ac402175c