Nanomechanical resonators
in: Physics-Uspekhi (Advances in Physical Sciences) (2012)
This paper reviews a current state of the development and application of nanomechanical resonators. The basic methods of manufacturing and characterization of nanoscale mechanical resonators are described. The problems of high resolution detection and visualization of material structure with the aid of nanomechanical resonators integrated in nanoelectromechanical and optomechanical systems are considered. Quantum properties of nanomechanical resonators as well as the methods of dynamical cooling in optomechanical and electromechanical systems are discussed.