Deep-Subwavelength Plasmonic Nanoresonators Exploiting Extreme Coupling

A metal-insulator-metal (MIM) waveguide is a canonical structure used in many functional plasmonic devices. Recently, research on nanoresonantors made from finite, i.e. runcated, MIM waveguides attracted a considerable deal of interest motivated by the promise for many groundbreaking applications. However, most suggested nanoresonators do not reach a deepsubwavelength domain. With ordinary fabrication techniques the dielectric spacers usually remain fairly thick, i.e. in the order of tens of nanometers. This prevents the wavevector of the guided surface plasmon polariton to strongly deviate from the light line. Here, we will show that the exploitation of an extreme coupling regime, which appears for only a few nanometers thick dielectric spacer, can lift this limitation. By taking advantage of atomic layer deposition we fabricated and characterized exemplarily deep-subwavelength perfect absorbers. Our results are fully supported by numerical simulations and analytical considerations. Our work provides impetus on many fields of nanoscience and will foster various applications in high-impact areas such as metamaterials, light harvesting, and sensing or the fabrication of quantum-plasmonic devices.