I'lichev, Evgeny V.;
in: Fizika Nizkikh Temperatur (Low Temperature Physics) (2017) 785
Technological processes for the fabrication of low and high Tc Josephson junctions, aimed for certain applications, are described. On one hand the integration of low Tc superconductor digital electronics with superconducting sensor arrays enables input signal processing with quantum limited resolution at millikelvin temperatures. We describe this mixed signal superconductor technology for analogue sensor readout and signal multiplexing for operating temperatures down to 300 mK. On the other hand, by making use of modern high Tc Josephson junction technology, sensitive magnetometers, which require a modest cooling power, can be developed. Examples of the application of the mentioned processes are shown.