LaReCa // CantiLaser
Sensors for the characterisation of micro- and nanostructures with extremely high spatial and force resolution (LaReCa) // Further development of cantilever technology using laser recrystallisation for nanoprobe stations (CantiLaser)
Runtime: 01.10.2023 - 30.09.2026
We address the growing demand in the field of micro & nanotechnology for sensors that combine high sensitivity with high force resolution and spatial resolution for surface analysis. The non-destructive electrical analysis of semiconductor devices at wafer level for failure analysis and in-line process control requires sensors with a lateral resolution in the nanometer range. The aim at Leibniz IPHT is to produce single-crystal cantilevers that improve sensitivity by around an order of magnitude.
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