The aim of the project is to enable microstructuring at the Leibniz IPHT with a maskless aligner for a structure size range that could not previously be addressed by photolithography, and at the same time to be able to meet the ever-increasing demands for resolution, sensitivity and efficiency of microstructured components for the institute’s scientific innovations in the fields of biophotonics, imaging and quantum detection with a high degree of flexibility. For these tasks, microlithography must become finer, more precise and more reproducible as complexity increases.

The project is funded by the Free State of Thuringia under funding code 2023 FGI 0020 and co-funded by the European Union under the European Regional Development Fund (ERDF).

Kofinanziert von der EU
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