The work group Microsystem and Nanotechnology focuses on the development of innovative micro- and nanotechnological methods and processes for the realization of highly integrated multilayer structural and functional elements for different sensor concepts, for the research of methods for the production of plasmonic nanomaterials for biophotonic applications as well as micro- and nanooptical components. The group is responsible for the preparation and supply of microfluidic chip components based on glass (borofloat) and/or silicon or quartz glass.
If the dimensions of materials and structures reach a few thousand atoms, the materials exhibit completely new physical properties. These, in turn, can be used to realize novel sensors with unmatched sensitivities. The conversion of the physical specifications into nanoscopic sensor concepts is one of the key priorities of the group, which cooperates closely with IPHT internal and external research groups.
Technologically, these activities are based on a closely linked combination of thin-film technology for metallic and dielectric materials, microsystems technology and nanolithography. The group's expertise lies primarily in the structuring of complex micro- and nanoscale structures at wafer level, from prototypes to small series.
The group is constantly researching new innovative micro- and nanotechnological methods and processes for the realization of highly integrated multilayer structural and functional elements for various sensor concepts. The work is mostly carried out specifically and in close coordination with other groups and departments in the Leibniz IPHT.
The focus of the fields of application lies above all in the field of optical sensor technology. A challenge here lies in the production of nanoscopic structures, which can be homogeneously produced with a high integration density on very large surfaces.