The task of the IR sensor production working group is the production of thin-film thermal sensors for industrial use. The sensors are based on the thermoelectric conversion principle using V/VI compound semiconductors. They meet the requirements of highest detectivity for applications in the life sciences such as medical technology, MIR spectroscopy and pyrometry as well as for special developments for numerous space missions. Typical sensors have a high linearity over five orders of magnitude. Based on the technological platform established here, thin-film Peltier coolers are manufactured for the measurement of the smallest amounts of water and the associated very low dew point temperatures. The working group has a unique selling point through the production of AC-DC thermoconverters, which are used as secondary standard in cooperation with PTB Braunschweig and for which the group is the only supplier of national metrology institutes worldwide.
The sensors are manufactured under the cleanest conditions in the clean room of the Leibniz IPHT using state-of-the-art MEMS methods on silicon wafers, tested, isolated and encapsulated by AVT methods according to customer specifications.
In order to meet future application-related and customer-specific requirements, the IR sensor production group works in close cooperation with the research group "Thermosensor Technology" on the following topics: