At the Competence Center Micro- and Nanotechnologies are developed on the basis of top-down thin-film processes chip- and wafer-based micro- and nanoscale functional elements with cross-cutting application relevance for the research units of the Leibniz IPHT.
The center represents one of the institute’s key technologies. With its clean room, it has an excellent infrastructure. Technologically, it covers the entire process chain from design, mask production, lithography, layer production and structuring to assembly and bonding technology and analytics.
The work is carried out by four groups: IR Sensor Production, Micro- and Nanotechnology as well as Microstructure analysis.
Generation of complex and functional micro- and nanostructures for