Fabrication of 3D self-assembled UV-NIR broadband absorbers using metastable atomic layer deposition (MS-ALD)

in: Advanced Materials Interfaces (2019)
Hübner, Uwe; Ziegler, Mario; Thamm, Sophie; Stolle, Heike Lisa Kerstin Stephanie; Wang, Dong; Schaaf, Peter

DOI: Array

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