Competence Center for Micro- and Nanotechnologies

We present a modular extreme ultraviolet (XUV) spectrometer system optimized for a broad spectral range of 12–41 nm (30–99 eV) with a high spectral resolution of _/__ & 784 _ 89. The spectrometer system has several operation modes for (1) XUV beam inspection, (2) angular spectral analysis, and (3) imaging spectroscopy. These options allow for a versatile use in high harmonic spectroscopy and XUV beam analysis. The high performance of the spectrometer is demonstrated using a novel cross-sectional imaging method called XUV coherence tomography.