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- Electronic and atomic structure studies of tin oxide layers using X-ray absorption near edge structure spectroscopy data modelling
Electronic and atomic structure studies of tin oxide layers using X-ray absorption near edge structure spectroscopy data modelling
in: Materials Science in Semiconductor Processing (2019)
The phase composition and local atomic and electronic structure of tin oxide layers have been studied by applying synchrotron X-ray absorption near edge structure spectroscopy. The inear combination analysis of the achieved results have been performed using ab initio calculated reference data for main tin-oxygen crystalline compounds. Our results suggest that proposed modelling approach successfully allows the reliable interpretation for Sn M4,5 X-ray absorption near edge spectra and appropriate atomic structure reconstruction and phase transformation dynamics in thermally oxidized tin oxide layers produced my magnetron sputtering.