Application and fabrication aspects of sub-micrometer-sized Josephson junctions
in: Fizika Nizkikh Temperatur (Low Temperature Physics) (2017)
We present the description of two methods for the fabrication of sub-micron sized Josephson junctions, namely the shadow-evaporation technique and the cross-type technology. Their importance for the field of modern superconducting technology is discussed. As an example we present measurement results of a two-qubit sample and a prototype of a microwave detector fabricated each by one of the described methods. We review potential applications of superconducting quantum circuits based on the developed methods.