A plasma source based on a microwave discharge at atmospheric pressure is used to produce an oxygen plasma torch. A liquid precursor material is evaporated and injected into the torch through a nozzle, causing oxidization and deposition of silica at a nearby quartz substrate. The temperature generated inside the plasma source and in the plume, in the region of treatment, and at the substrate surface are key parameters, which are needed for process description and optimization of plasma-chemical reactions. Optical emission spectroscopy and thermography were applied to observe and characterize the jet behavior and composition. The experimental results are compared with self-consistent modeling.